کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1660036 1517691 2008 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Mechanical properties of a-C:H/Si-containing a-C:H multilayered coatings grown by LF-PECVD
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Mechanical properties of a-C:H/Si-containing a-C:H multilayered coatings grown by LF-PECVD
چکیده انگلیسی

Amorphous hydrogenated carbon (a-C:H), Si-containing a-C:H and a-C:H/Si-containing a-C:H multilayered films have been deposited by low frequency plasma enhanced chemical vapour deposition (LF-PECVD) from cyclohexane and/or tetramethylsilane gas mixtures.Structural and mechanical properties of single layers have been first studied in relation with the working pressure, the gas mixture and especially the plasma power. By optimising these parameters, a-C:H films reveal very interesting mechanical and tribological properties (hardness of 23 GPa, friction coefficient of about 0.04 and wear rate of 1.50 10− 7 mm3 N− 1 m− 1 (under air, against Al2O3, with Hertz pressure of 0.65 GPa)) with compressive residual stress values about − 1 GPa. Inversely, Si-containing a-C:H films offer a wider range of mechanical behaviour (7–20 GPa for the hardness and 50–170 GPa for the Young modulus) while preserving lower residual stress values (− 0.5 GPa).Then, previous results have been exploited to study a-C:H/Si-containing a-C:H multilayered coatings. Transmission Electron Microscopy, nanoindentation, stress measurements and ball-on-disk tribometer were used to characterize these multilayered films. First results show the possibility to obtain from precursor gas inlet modulation thick multilayered coatings (∼ 10 µm) with period thicknesses down to 15 nm. Period thickness has no influence on hardness, Young modulus and residual stress within the investigated domain. However, friction coefficient and wear resistance are improved by decreasing the period or by optimising the properties of the Si-containing layer.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 203, Issues 5–7, 25 December 2008, Pages 745–749
نویسندگان
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