کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1660151 | 1517689 | 2009 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Nano-processing with gas cluster ion beams
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Nano-processing with gas cluster ion beams Nano-processing with gas cluster ion beams](/preview/png/1660151.png)
چکیده انگلیسی
The gas cluster ion beam process has become a candidate technique for advanced nano-fabrication, where both throughput and precise functionality are required. It is demonstrated that both extreme high-speed and precise nano-processing with low damage can be realized using reactive cluster ion beams. To date, this technique has been successfully applied to photonic, magnetic, electronic, and biological materials processing. The energy and size of cluster have become well controllable and many kinds of gaseous materials become available as cluster source gas. The fundamentals and applications of gas cluster ion beam process are reviewed in this paper.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 203, Issues 17â18, 15 June 2009, Pages 2446-2451
Journal: Surface and Coatings Technology - Volume 203, Issues 17â18, 15 June 2009, Pages 2446-2451
نویسندگان
Toshio Seki,