Influence of ion-bombardment-energy on thin zirconium oxide films prepared by dual frequency oxygen plasma sputtering

Thin ZrO2 films were prepared using dual frequency oxygen reactive plasma sputtering for wear-resistance coating of ceramics products. Influences of ion-bombardment-energy Ei were investigated for improvement of film characteristics. The results revealed that the deposition rate and the hardness of the prepared ZrO2 thin films gradually increased with increasing Ei for Ei < 220–250 eV and then decreased, whereas the water-contact-angle on ZrO2 thin films was about 90 °, having a good water-repellent nature.