کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1661581 | 1517699 | 2007 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Ion beam etched diffraction gratings in fused quartz and lithium niobate
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Ion beam etched diffraction gratings in fused quartz and lithium niobate Ion beam etched diffraction gratings in fused quartz and lithium niobate](/preview/png/1661581.png)
چکیده انگلیسی
Optical diffraction gratings in fused quartz and lithium niobate are fabricated by standard photolithography technique and the following etching of argon ion beam at energy of 500 eV. The periods of the grating structures are designed from 13 to 50 μm. Diffraction patterns of the gratings are observed by a He-Ne laser beam. The etch depth is measured by a profilometer. A scanning electron microscope is used for visual inspection of the structures produced. These investigations show a series of fairly good microstructures formed on the surface region of the samples.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 201, Issues 9â11, 26 February 2007, Pages 5046-5049
Journal: Surface and Coatings Technology - Volume 201, Issues 9â11, 26 February 2007, Pages 5046-5049
نویسندگان
Yang Jiao Yang Jiao, Ke-Ming Wang, Xue-Lin Wang, Lei Wang Lei Wang, Chuan-Lei Jia, Yi Jiang Yi Jiang, Jian-Hua Zhang, Fei Lu Fei Lu,