Nano-multilayer Ti-Zr-N coating by a central configured multi-arc coating process

The deposited coatings range from a micro- to nano-layered (TiN/ZrN) structure as the rotation speed of the substrate table was increased. Each layer exhibits a (111) preferred orientation. At rotating speeds in excess of 10 rpm, a nano-multilayered Ti(Zr)N structure is formed, again with each layer having (111) preferred orientation. At the highest rotation speeds the greatest surface hardness and film adhesion strength are attained. This is attributed to the maximized stress accommodation of the nano-multilayer structure, through the different shear elastic modulus of each layer. This research demonstrates that this novel CCMA AIP system is highly flexible in coating material design and capable of mass production.