کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1678077 1009927 2011 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Atom probe tomography and transmission electron microscopy of a Mg-doped AlGaN/GaN superlattice
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Atom probe tomography and transmission electron microscopy of a Mg-doped AlGaN/GaN superlattice
چکیده انگلیسی

The electronic characteristics of semiconductor-based devices are greatly affected by the local dopant atom distribution. In Mg-doped GaN, the clustering of dopants at structural defects has been widely reported, and can significantly affect p-type conductivity. We have studied a Mg-doped AlGaN/GaN superlattice using transmission electron microscopy (TEM) and atom probe tomography (APT). Pyramidal inversion domains were observed in the TEM and the compositional variations of the dopant atoms associated with those defects have been studied using APT. Rarely has APT been used to assess the compositional variations present due to structural defects in semiconductors. Here, TEM and APT are used in a complementary fashion, and the strengths and weaknesses of the two techniques are compared.

Research Highlights
► Mg-rich regions of approximately 5 nm in size were revealed in Mg-doped AlGaN/GaN superlattices using atom probe tomography (APT).
► Transmission electron microscopy (TEM) of the superlattice sample showed pyramidal inversion domains, concluded to be the same Mg-rich features observed by APT.
► The information gained from both the 3D APT study and the 2D TEM characterisation was then compared to determine the strengths and weaknesses of each technique in analysing nanoscale features in nitride materials.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultramicroscopy - Volume 111, Issue 3, February 2011, Pages 207–211
نویسندگان
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