Real-time imaging of surface evolution driven by variable-energy ion irradiation

We describe the design of a tandem instrument combining a low-energy electron microscope (LEEM) and a negative ion accelerator. This instrument provides video rate imaging of surface microtopography and the dynamics of its evolution during irradiation by energetic ions, at temperatures up to 1700 K. The negative ion beam is incident on the sample at normal incidence with impact energies selectable in the range 0–5 keV, and with current densities up to 30 μA/cm2 (∼2×1014 ions/cm2 s or ∼0.2 ML/s). The LEEM operates at a base pressure in the 10−9 Pa range. We describe the design and operating principles of the instrument and present examples of Pt(1 1 1) and Si(0 0 1) self-ion irradiation experiments.