Investigation of CdS thin films by a near-field microwave microprobe

Cadmium sulphide (CdS) thin films with different microstructures and morphologies were measured by using a near-field microwave microprobe (NFMM). The NFMM system was coupled to a dielectric resonator with a distance regulation system at an operating frequency f=4.1 GHz. The changes in dielectric permittivity of CdS thin films due to different annealing temperatures were investigated by measuring the reflection coefficient S11. CdS thin films with different microstructures and morphology were characterized by X-ray diffraction, atomic force microscopy and NFMM.