کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1678970 1009983 2008 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Charge drives for scanning probe microscope positioning stages
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Charge drives for scanning probe microscope positioning stages
چکیده انگلیسی

Due to hysteresis exhibited by piezoelectric actuators, positioning stages in scanning probe microscopes require sensor-based closed-loop control. Although closed-loop control is effective at eliminating non-linearity at low scan speeds, the bandwidth compared to open loop is severely reduced. In addition, sensor noise significantly degrades achievable resolution in closed loop.In this work, charge drives are evaluated as a simple positioning alternative when feedback control cannot be applied or provides inadequate performance. These situations arise in high-speed imaging, where position sensor noise can be large or where no feedback sensors are present.Charge drives can reduce the error caused by hysteresis to less than 1% of the scan range. We review the design of charge drives and compare them to voltage amplifiers for driving lateral SPM scanners. The first experimental images using charge drive are presented.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultramicroscopy - Volume 108, Issue 12, November 2008, Pages 1551–1557
نویسندگان
, ,