Emission of secondary ions after grazing impact of keV ions on solid surfaces

We have scattered He+ and Ar+ ions with energies of 10 and 20 keV from solid surfaces and investigated by means of a quadrupole mass spectrometer the emission of secondary ions. Compared to the established method of secondary ion mass spectroscopy (SIMS), the impact of ions proceeds under a grazing angle of incidence of about 2°. In experiments with a Cu(1 0 0) target covered with an ultrathin Fe3O4 film as well as ZnO and ZnMgO surfaces we have explored some basic features of this variant of SIMS concerning the potential application as surface analytical tool.