کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1681367 1010437 2010 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Effects of ion irradiation on the mechanical properties of SiNawOxCyHz sol-gel derived thin films
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Effects of ion irradiation on the mechanical properties of SiNawOxCyHz sol-gel derived thin films
چکیده انگلیسی
A study of the effects of ion irradiation of hybrid organic/inorganic modified silicate thin films on their mechanical properties is presented. NaOH catalyzed SiNawOxCyHz thin films were synthesized by sol-gel processing from tetraethylorthosilicate (TEOS) and methyltriethoxysilane (MTES) precursors and spin-coated onto Si substrates. After drying at 300 °C, the films were irradiated with 125 keV H+ or 250 keV N2+ at fluences ranging from 1 × 1014 to 2.5 × 1016 ions/cm2. Nanoindentation was used to characterize the films. Changes in hardness and reduced elastic modulus were examined as a function of ion fluence and irradiating species. The resulting increases in hardness and reduced elastic modulus are compared to similarly processed acid catalyzed silicate thin films.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 268, Issue 19, 1 October 2010, Pages 2926-2929
نویسندگان
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