A new cluster-ion-beam source for secondary ion mass spectrometry (SIMS) using the electrospray of a pure ionic liquid under high vacuum

Electrospray characteristics were studied using a pure room-temperature molten salt (i.e., an ionic liquid) at pressures around 10−5 Pa as well as at atmospheric pressure. The ionic liquid N,N-diethyl-N-methyl-N-(2-methoxyethyl)ammonium bis(trifluoromethanesulfonyl)imide was tested, which has negligible vapor pressure and high conductivity. During electrospray, the ionic liquid was introduced at a constant flow rate into a stainless-steel capillary (i.d. 30 μm). It was demonstrated that stable electrosprayed currents exceeding ±1 μΑ were continuously produced in both positive and negative modes. The electrosprayed currents in a high vacuum were twice those at atmospheric pressure. It was found that gas pressure rose slightly with increasing electrosprayed currents. Residual gas analysis revealed that gas component at negative mode was different from that at positive mode. Experimental results indicate that vacuum electrospray of pure ionic liquids is applicable to a massive-cluster beam source for SIMS.