Formation of local ferromagnetic areas on GaAs by focused Mn ion beam implantation

Magnetic and chemical properties of Mn-implanted surfaces of a GaAs substrate were investigated using a magnetic force microscope (MFM) and X-ray photoemission spectroscopy (XPS). The Mn implanted region was changed to a grain structure after annealing at 840 °C for 10 s, and ferromagnetic characteristics were observed in each grain. From the XPS spectra, it was found that implanted Mn was chemically bonded with other elements, indicating the formation of ferromagnetic materials such as GaMn and MnAs.