کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1685286 | 1010551 | 2007 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Growth and characteristics of diamond-like carbon (DLC) films deposited by direct negative carbon ion beam deposition
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Growth and characteristics of diamond-like carbon (DLC) films deposited by direct negative carbon ion beam deposition Growth and characteristics of diamond-like carbon (DLC) films deposited by direct negative carbon ion beam deposition](/preview/png/1685286.png)
چکیده انگلیسی
The films prepared at 150Â eV showed the more flat surface morphology of the film than that of the film prepared under another ion beam energy conditions and diamond structure also obtained at 150Â eV. Surface roughness of DLC film varied from 0.62 to 0.22Â nm with depositing carbon ion beam energy. The film prepared at 50Â eV shows the typical amorphous phase, while the films prepared at 150Â eV exhibited (1Â 1Â 1) plane of diamond. Nanohardness increased from 12 to 57Â GPa when increasing the negative carbon ion beam energy from 25 to 150Â eV and then decreased above 150Â eV.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 254, Issue 1, January 2007, Pages 93-97
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 254, Issue 1, January 2007, Pages 93-97
نویسندگان
Daeil Kim, H.S. Jang, Y.S. Kim, D.H. Choi, B.K. Choi, J.H. Lee, Y.Z. You, H.G. Chun,