Pattern formation on InP(1Â 1Â 1) surfaces after ion implantation

We have investigated the formation of nanosized structures on InP(1 1 1) surfaces after 1.5 MeV Sb implantation. Scanning probe microscope (SPM) has been utilized to investigate the size, height and the density distributions of the nanostructures as a function of ion fluence. We observe nanostructures smaller than 100 nm and lower than 4 nm at all fluences. Moreover in large nanostructures we observe agglomeration of several smaller structures. We have also investigated the rms surface roughness of the InP(1 1 1) surfaces after MeV implantations.