Influence of texture on optical and electrical properties of diamond films

The optical and electrical properties of variously textured diamond films have been investigated in this paper. SEM and Raman spectrum indicated that the films produced were of high quality with either (0 0 1) or (1 1 1) orientation. A four-layer model was used to fit the measured spectroscopic ellipsometry data. The results indicated that the properties of (0 0 1)-oriented diamond films were superior to those of (1 1 1)-oriented one. The refractive index and extinction coefficient of (0 0 1)-oriented diamond film in the infrared region of 2500–12500 nm was measured as 2.391 and of the order of 10−5, respectively and that for (1 1 1)-oriented one was 2.375 and of the order of 10−4, respectively. The dark current of the (0 0 1)-oriented diamond film was measured as 33.7 nA for an applied electric field of 100 kV cm−1, its resistivity being about 2.33×1010 Ω cm. Current passing through the (0 0 1)-oriented diamond film during testing did not change significantly.