کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1691217 1011300 2008 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Electron-beam-induced current evidence for room-temperature photoluminescence of silicon pn diode
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Electron-beam-induced current evidence for room-temperature photoluminescence of silicon pn diode
چکیده انگلیسی
The pn diodes were fabricated by implanting B ions into n-type Si substrate and followed by annealing at 950 °C for 20 min. Carrier concentrations of the pn diodes were measured by spreading resistance profile (SRP). The room-temperature photoluminescence (PL) and the microstructures of the defects resulted from the ion-implantation of the pn diodes were investigated. Electron-beam-induced current (EBIC) was measured to detect carrier recombinations at different depth in the pn diode. The enhanced PL line centered at about 1160 nm, which is related to band edge radiative recombination, was observed in the implanted sample. It was found that dislocation loops were formed in the p-type region which is above the pn junction. Moreover, there are intense carrier recombinations at the region of dislocation loops. The EBIC results proved that the enhanced luminescence originated from the region of dislocation loops, but not from the dislocation loops themselves. It is believed that the intense band edge luminescence is due to the quantum confinement of dislocation loops.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 82, Issue 11, 19 June 2008, Pages 1337-1340
نویسندگان
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