کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1785837 1023396 2014 23 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Enhanced performance of graphene by using gold film for transfer and masking process
ترجمه فارسی عنوان
عملکرد گرافنی با استفاده از فیلم طلایی برای فرآیند انتقال و ماسک افزایش یافته است
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
چکیده انگلیسی
In this study, we tried to reduce the organic contamination of graphene. This organic contamination most likely occurs during the graphene transfer and lithography steps, which in turn degrades the quality of the graphene. Inorganic Au film was applied for Au-assisted transfer instead of the conventional thin poly(methyl methacrylate), and a new fabrication process using the Au-film for the transfer and masking layer was designed in order to minimize the contamination of graphene from organic residues. As a result, we demonstrated that the overall qualities of the transferred graphene film and graphene transistors have been highly improved. These improvements include an enhancement of mobility, and a decrease of defects, unintentional doping, contact resistance, and sheet resistance.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Current Applied Physics - Volume 14, Issue 8, August 2014, Pages 1045-1050
نویسندگان
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