Thick orientation-patterned GaAs grown by low-pressure HVPE on fusion-bonded templates

► Orientation-patterned GaAs (OP-GaAs) templates fabricated using wafer fusion bonding. ► Nonlinear optical frequency conversion for mid-IR and THz sources. ► Low pressure epitaxial regrowth of 600 μm-thick GaAs replicates the template pattern.