Epitaxial growth of quasi-phase matched GaP for nonlinear applications: Systematic process improvements

► We achieved fast, reproducible, thick epitaxial growth of GaP with high quality. ► We found the best orientation of substrate and pattern for making GaP OP-templates. ► We adapted MBE inversion and wafer fused bonding to prepare GaP OP-templates. ► We achieved vertical propagation of the domain walls for both types templates. ► We proved that by HVPE we can grow +350 μm thick high quality QPM GaP structures.