A study of the parameters influencing the microstructure of thick La2Zr2O7 films

Thick La2Zr2O7 (LZO) layers were produced via a water-based sol–gel route. All layers were analyzed in-depth by XRD, pole figures and transmission electron microscopy. Well-textured thick layers (120 nm) could be obtained by adjusting the heat treatment and introducing a LZO seed layer (20 nm). The overall quality of the LZO layers greatly improved by the introduction of seed layers. Nevertheless, nanovoids were found in the thick LZO layers. A tentative explanation for parameters influencing the origin and development of the nanovoids is presented, based on TEM observations.

► La2Zr2O7 thick buffer layers with high epitaxial quality.
► Study of nanovoid formation and new suggestions for mechanism.
► TEM study of use of seed layers in LZO buffer layers.