کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1793065 | 1023664 | 2010 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Growth mechanism of c-axis-oriented AlN on (0Â 0Â 1) diamond substrates by metal-organic vapor phase epitaxy
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Growth mechanism of c-axis-oriented AlN on (0Â 0Â 1) diamond substrates by metal-organic vapor phase epitaxy Growth mechanism of c-axis-oriented AlN on (0Â 0Â 1) diamond substrates by metal-organic vapor phase epitaxy](/preview/png/1793065.png)
چکیده انگلیسی
Wurtzite AlN layers are grown on a (0 0 1) diamond substrate by metal-organic vapor phase epitaxy. The microstructure and growth mechanism of the AlN layer are examined using atomic force microscopy, X-ray diffractometry, and transmission electron microscopy. At the initial stage of AlN growth, AlN crystalline particles with various orientations are randomly nucleated on the (0 0 1) diamond surface. At the second step of growth, AlN grains predominantly oriented along the c-axis grow, incorporate the randomly oriented AlN grains, and then grow further. At the final step of growth, a continuous AlN layer with a c-axis-oriented two-domain structure is obtained on the (0 0 1) diamond substrate. Microstructural analysis reveals that either the ã112¯0ã AlN domain or ã101¯0ã AlN domain is aligned on the [1 1 0] diamond direction. The growth mechanism governs by the higher growth rate of the AlN grains along the [0 0 0 1] direction than along other directions at high growth temperatures up to 1270 °C.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 312, Issue 3, 15 January 2010, Pages 368-372
Journal: Journal of Crystal Growth - Volume 312, Issue 3, 15 January 2010, Pages 368-372
نویسندگان
Masataka Imura, Kiyomi Nakajima, Meiyong Liao, Yasuo Koide, Hiroshi Amano,