کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1794674 | 1023704 | 2009 | 7 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Epitaxial NiO (1 0 0) and NiO (1 1 1) films grown by atomic layer deposition Epitaxial NiO (1 0 0) and NiO (1 1 1) films grown by atomic layer deposition](/preview/png/1794674.png)
Epitaxial NiO (1 1 1) and NiO (1 0 0) films have been grown by atomic layer deposition on both MgO (1 0 0) and α-Al2O3 (0 0 l) substrates at temperatures as low as 200 °C by using bis(2,2,6,6-tetramethyl-3,5-heptanedionato)Ni(II) and water as precursors. The films grown on the MgO (1 0 0) substrate show the expected cube on cube growth while the NiO (1 1 1) films grow with a twin rotated 180° on the α-Al2O3 (0 0 l) substrate surface. The films had columnar microstructures on both substrate types. The single grains were running throughout the whole film thickness and were significantly smaller in the direction parallel to the surface. Thin NiO (1 1 1) films can be grown with high crystal quality with a FWHM of 0.02–0.05° in the rocking curve measurements.
Journal: Journal of Crystal Growth - Volume 311, Issue 16, 1 August 2009, Pages 4082–4088