کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1794984 | 1023711 | 2008 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Structural properties of ZnO thin films on Si substrate using femtosecond laser deposition
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Structural properties of ZnO thin films on Si substrate using femtosecond laser deposition Structural properties of ZnO thin films on Si substrate using femtosecond laser deposition](/preview/png/1794984.png)
چکیده انگلیسی
The effects of experimental parameters such as substrate temperature, laser intensity and pressure of oxygen on the structural properties of zinc oxide (ZnO) films using femtosecond laser deposition were studied in this paper. The c-axis-oriented ZnO films were obtained under the optimized conditions with the temperature of substrate and the pressure of oxygen being 80 °C and 1Ã10â3 Pa, respectively. The structural properties were analyzed by X-ray diffraction and surface morphology of films was analyzed by field-emission scanning electron microscopy, and the results showed that the prepared films are of fine grains (30-50 nm) and of even density. Furthermore, the optical transmissivity of annealed ZnO films were also studied in the range from 200 to 900 nm.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 310, Issue 3, 1 February 2008, Pages 551-555
Journal: Journal of Crystal Growth - Volume 310, Issue 3, 1 February 2008, Pages 551-555
نویسندگان
Yifa Yang, Hua Long, Guang Yang, Nengli Dai, Qiguang Zheng, Peixiang Lu,