کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1794984 1023711 2008 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Structural properties of ZnO thin films on Si substrate using femtosecond laser deposition
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
Structural properties of ZnO thin films on Si substrate using femtosecond laser deposition
چکیده انگلیسی
The effects of experimental parameters such as substrate temperature, laser intensity and pressure of oxygen on the structural properties of zinc oxide (ZnO) films using femtosecond laser deposition were studied in this paper. The c-axis-oriented ZnO films were obtained under the optimized conditions with the temperature of substrate and the pressure of oxygen being 80 °C and 1×10−3 Pa, respectively. The structural properties were analyzed by X-ray diffraction and surface morphology of films was analyzed by field-emission scanning electron microscopy, and the results showed that the prepared films are of fine grains (30-50 nm) and of even density. Furthermore, the optical transmissivity of annealed ZnO films were also studied in the range from 200 to 900 nm.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 310, Issue 3, 1 February 2008, Pages 551-555
نویسندگان
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