Structures and properties of (Zn,Mg)O films studied from the aspect of phase equilibria

The structural properties of binary alloy compounds of the ZnO–MgO system have been investigated. Pulsed laser deposition (PLD) yielded single-phase films of wurtzite-type (Zn1−xMgx  )O within the compositional range of x⩽0.47x⩽0.47. After annealing, the (Zn1−xMgx  )O films with x⩾0.18x⩾0.18 decomposed into a rocksalt-type and a wurtzite-type phase, whereas the sample with x=0.12x=0.12 remained as wurtzite-type single phase. Thus, the solubility limit of this system seems to be within the range of 0.12