Method for a quick estimation of energy dependent reflection electron energy loss spectroscopy spectra for Al and Si

The partial intensity of emitted electrons is obtained from the measured REELS spectra based on the extended Landau equation for Al and Si. The relationship between the partial intensity and different emission angles for an identical primary energy is given. An empirical formula has been fitted for the partial intensities at different energies, which provides a guideline for estimating the energy dependence of REELS spectra for Al and Si for a specific geometrical arrangement of the experiment.