Decomposition of high concentration SF6 using an electron beam

• High concentration of SF6 was removed up to 99% by electron beam (EB) irradiation.
• The DRE of SF6 increased as the irradiation intensity and retention time increased.
• The DRE of SF6 increased by adding H2 in an EB irradiation process.
• The main by-product formed from SF6 decomposition using the electron beam was HF.

In this study, high concentration SF6 (2–10%) was decomposed using an electron beam irradiation. Various influential factors were investigated to improve the destruction and removal efficiency (DRE) of SF6. The initial concentrations of SF6, absorbed doses, SF6/H2 ratios and retention times were the main factors of concern. As a result, the DRE increased as the adsorbed dose and retention time increased. The DRE of SF6 also increased up to 20% approximately when H2 was added to the reaction mixture. On the other hand, the DRE of SF6 decreased as initial concentrations of SF6 increased. Finally, the main by-product formed from SF6 decomposition by the electron beam was HF.