کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
37616 45376 2006 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Trends in imprint lithography for biological applications
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی بیو مهندسی (مهندسی زیستی)
پیش نمایش صفحه اول مقاله
Trends in imprint lithography for biological applications
چکیده انگلیسی

Imprint lithography is emerging as an alternative nano-patterning technology to traditional photolithography that permits the fabrication of 2D and 3D structures with <100 nm resolution, patterning and modification of functional materials other than photoresist and is low cost, with operational ease for use in developing bio-devices. Techniques for imprint lithography, categorized as either ‘molding and embossing’ or ‘transfer printing’, will be discussed in the context of microarrays for genomics, proteomics and tissue engineering. Specifically, fabrication by nanoimprint lithography (NIL), UV-NIL, step and flash imprint lithography (S–FIL), micromolding by elastomeric stamps and micro- and nano-contact printing will be reviewed.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: - Volume 24, Issue 7, July 2006, Pages 312–317
نویسندگان
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