کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
4971848 1450536 2016 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fast and trusted intrinsic stress measurement to facilitate improved reliability assessments
ترجمه فارسی عنوان
اندازه گیری استرس ذاتی سریع و قابل اعتماد برای تسهیل ارزیابی قابلیت اطمینان بهتر
کلمات کلیدی
استرس باقی مانده، پرتو یون متمرکز شده، همبستگی تصویر دیجیتال، قابلیت اطمینان،
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
چکیده انگلیسی
A new measurement method for mechanical stresses with microscopic and sub-microscopic spatial resolution is presented. It bases on classical stress relief techniques in experimental mechanics, as for example the familiar hole drilling method. Applicability of the classic method for micro and nano size objects was achieved, using very local stress relief caused by ion milling inside commercial FIB equipment and image correlation algorithms for the determination of corresponding relaxation strains. Approximately 10 years ago, first publications demonstrated the principal feasibility of the approach. Now, this work gives a more detailed view on different measurement variations, their capabilities and limitations. The paper reports on the effort made for qualifying the new method for use under real industrial conditions, which includes validation of techniques, best practice based choice of tools and sufficient automation of the measurement process. Finally an application example from 3D integration in electronics demonstrates practical benefit obtained by the method.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Reliability - Volume 64, September 2016, Pages 276-280
نویسندگان
, , , ,