Recent advances in MEMS-based micro heat pipes

MEMS-based micro heat pipes (MHPs), as a novel heat pipe technology, is considered a promising choice for thermal management applications in microelectronic circuits packaging, concentrating photovoltaic cells, infrared detectors, laser diodes, etc. This paper presents a comprehensive review on recent developments and advances in different types of MEMS-based MHPs and emerging polymer flexible heat pipes, starting from a brief introduction of basic concept, structure characteristics, and advantages over conventional heat pipes. The fabrication and packaging methodology of MEMS-based MHPs are summarized and compared. The progress in diverse MEMS-based MHPs, focusing on experimental aspects, is thoroughly reviewed and discussed. Also, the nature-inspired nanostructured and micro/nano hierarchical wicks suitable for MEMS-based MHPs are briefly introduced. Some promising and innovatory applications of MEMS-based MHPs are reported. Finally, challenges impacting the development and application of MEMS-based MHPs are outlined.