A 915 MHz/75 kW cylindrical cavity type microwave plasma chemical vapor deposition reactor with a ladder-shaped circumferential antenna developed for growing large area diamond films

A 915 MHz/75 kW cylindrical cavity type microwave plasma chemical vapor deposition reactor with a ladder-shaped circumferential antenna developed for growing large area diamond films

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 78, September 2017, Pages 67-72

Y.F. Li, X.M. An, X.C. Liu, L. Jiang, P.W. Zhang, H. Guo, Z.L. Sun, H.Z. Zhao, W.Z. Tang,