کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5000622 1460758 2017 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Intrinsic stress evolution during different growth stages of diamond film
ترجمه فارسی عنوان
تکامل استرس ذاتی در مراحل مختلف رشد الماس
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
چکیده انگلیسی


- Different growth stages of diamond film were prepared on the same substrate.
- The intrinsic stress transformed from compress to tensile during film initial growth stages.
- The evolution of the intrinsic stress was depended on the effect of grain boundary formation.

The CVD diamond films at different growth stages were prepared on the same substrate by DC arc plasma jet CVD. The surface morphologies and residual stress of diamond films were characterized by scanning electron microscope and Raman spectroscopy. The intrinsic stress of diamond films were obtained by subtracting thermal stress from residual stress. The results showed that the intrinsic compress stress was 0.42 GPa for the precoalescence stage due to the sp2 carbon inclusions in diamond islands. With the diamond islands growing up and even snapping together to form grain boundary at the coalescence stage the intrinsic compress stress was 0.06 GPa. Eventually, the diamond islands coalesced into a continuous polycrystalline film, the intrinsic compress stress vanished and converted to tensile stress, the intrinsic tensile stress reached 1.41 GPa due to the number of grain boundaries increasing. The evolution of intrinsic stress during diamond film initial growth was mainly attributed to the surface free energy of diamond islands changed to the free energy of grain boundaries which was consistent with the Nix-Clemens model.

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ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 73, March 2017, Pages 62-66
نویسندگان
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