Analysis of Surface Formation of Rotary Ultrasonic Milling of Quartz Glass Based on Nano-indentation Experiment

As an effective and efficient way of machining in hard-brittle materials, rotary ultrasonic milling(RUM) has many unique advantages. In this research, machining and nano-indentation tests had been undertaken in order to obtain the material removal mechanisms and transformational rules of quartz glass, and the machined surface roughness and the three-dimensional morphology were analyzed according to the detection results deriving from laser confocal microscope. The influence law and the machining mechanism of feed speed, depth of cut with and without ultrasonic on the machined surface quality were discussed. The material removal mode nearby the final formed surface deriving from combination of ultrasonic vibration and depth of cut plays an key role in the formation of machined surface quality in milling process. This research work could provide some process foundation for rotary ultrasonic face milling of quartz glass.