Ultrahigh density sub-10 nm TiO2 nanosheet arrays with high aspect ratios via the spacer-defined double-patterning process

Ultrahigh density sub-10 nm TiO2 nanosheet arrays with high aspect ratios via the spacer-defined double-patterning process

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Polymer - Volume 60, 9 March 2015, Pages 267-273

Chang Hong Bak, Se Jin Ku, Gyeong Cheon Jo, Kyoungok Jung, Ha Jin Lee, Se Hun Kwon, Jin-Baek Kim,