کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5182812 1380999 2012 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی آلی
پیش نمایش صفحه اول مقاله
Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics
چکیده انگلیسی

The mechanical properties of an epoxy-based chemically amplified resists with various cross-linking ratios were simulated using a newly developed coarse-grained molecular dynamics simulation that employs a bead-spring model. Models with the different cross-linking ratios were created in the molecular dynamics calculation step and uniaxial elongation simulations were performed. The results reveal that the simulated elastic modulus of the resist modeled by the Kremer-Grest model with an extended angle bending potential depends on the cross-linking ratio, its dependency exhibits good agreement with that determined by nanoindentation tests.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Polymer - Volume 53, Issue 21, 28 September 2012, Pages 4834-4842
نویسندگان
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