Impact of Gd2O3 passivation layer on interfacial and electrical properties of atomic-layer-deposited ZrO2 gate dielectric on GaAs

Impact of Gd2O3 passivation layer on interfacial and electrical properties of atomic-layer-deposited ZrO2 gate dielectric on GaAs

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 291, 1 February 2014, Pages 35-39

Youpin Gong, Haifa Zhai, Xiaojie Liu, Jizhou Kong, Di Wu, Aidong Li,