کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5354717 | 1388180 | 2012 | 5 صفحه PDF | دانلود رایگان |
Thin films of La0.85Sr0.15MnO3 (LSM) are deposited on (1 0 0) silicon wafer and YSZ (yttria-stabilized zircornia) electrolyte substrates by magnetron sputtering using a single-phase LSM target. The conditions for sputtering are systematically studied, including substrate temperature (from room temperature to 600 °C), the argon background pressure (from 1.2 Ã 10â2 to 3.0 Ã 10â2 mbar), and deposition time. Results show that the optimal conditions for producing a dense, uniform, and crack-free LSM film include a substrate temperature of 600 °C and an argon pressure of 1.9 Ã 10â2 mbar. Further, a testing cell with a dense LSM film, an YSZ electrolyte membrane, and a porous LSM counter electrode is prepared and the electrochemical properties of the dense LSM film on YSZ substrate are studied. It was found that the thickness, morphology, and microstructure of LSM films critically influence the electrochemical properties.
⺠The LSM films were prepared by rf-magnetron sputtering and process parameters (work pressure and substrate temperature) were studied. ⺠The microstructure and morphology of LSM films were tested by SEM, Raman and XRD and its electrical properties were studied. ⺠The results show that high quality (dense and uniform) LSM films with desired thickness, morphology, and microstructure critically influence the electrochemical properties.
Journal: Applied Surface Science - Volume 258, Issue 17, 15 June 2012, Pages 6199-6203