Modeling the reactive sputter deposition of N-doped TiO2 for application in dye-sensitized solar cells: Effect of the O2 flow rate on the substitutional N concentration

► Berg model was applied to simulate the deposition of N-doped TiO2. ► N-doped TiO2 is grown from chemisorption and oxidation of TiN. ► Substitutional N is mainly incorporated from oxidation of TiN.