Surface potential patterning of hydroxyapatite films by focused electron beam: Influence of the electron energy

► Surface potential of hydroxyapatite films was locally modified by electron beam. ► Resulting surface potential domains were examined by Kelvin probe force microscopy. ► Size of the domains strongly depends on the incident electron energy. ► Minimal domain size is limited by the e-beam diameter and its interaction volume. ► Smaller domains obtained by using smaller current compensated by longer irradiation.