Structure and mechanical properties of TiC films deposited using combination of pulsed DC and normal DC magnetron co-sputtering

► Variation of preferred orientation with carbon content in the film. ► Variation of surface microstructure with Ti and C ratio. ► Coefficient of friction varies between 0.15 and 0.04 for all Ti and C ratio. ► Synthesis of TiC thin films using pulsed balanced magnetron sputtering. ► Better mechanical properties with reduced ion bombardment effect.