Remote plasma cleaning of optical surfaces: Cleaning rates of different carbon allotropes as a function of RF powers and distances

Remote plasma cleaning of optical surfaces: Cleaning rates of different carbon allotropes as a function of RF powers and distances

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 362, 30 January 2016, Pages 448-458

M. González Cuxart, J. Reyes-Herrera, I. Å ics, A.R. Goñi, H. Moreno Fernandez, V. Carlino, E. Pellegrin,