Mechanical and optical characteristics of multilayer inorganic films on polyimide for anti-atomic-oxygen erosion

► Multilayer inorganic films were fabricated for protection against atomic oxygen in LEO. ► Higher level of optical transmittance and anti-AO erosion properties were matched with the mechanical stability. ► The FVAPIID process will be promising for fabricating inorganic films on polymer substrate for anti-AO erosion.