Evaporation and removal mechanism of phosphorus from the surface of silicon melt during electron beam melting

► Phosphorus can be removed to less than 0.07 × 10−4 wt.% by electron beam melting. ► The phosphorus content decreases rapidly at first and then tends to level out. ► Phosphorus evaporation in the melt free surface follows the first order kinetics. ► The mass transfer coefficients of phosphorus in silicon are calculated and discussed. ► The removal of phosphorus is controlled by both diffusion and evaporation.