Study of thermal stability of ZnO:B films grown by LPCVD technique

► Thermal stability of ZnO:B films with different doping level and thickness grown by LPCVD technique are investigated. ► Total transmission of the films at near infrared wavelength range increases with the enhanced thermal treating intensity. ► Morphology of the ZnO:B films does not change after the thermal treatment. ► Film resistivity increases with increasing treating duration for the ZnO:B films. ► Chemisorption of oxygen into ZnO films is responsible for the decrease of carrier concentration after the heat treatment.