Keywords: a-C; amorphous Carbon; a-Si; amorphous silicon; a-Si:H; hydrogenated amorphous silicon; AgNC; silver nanocomposite; AgNW; silver nanowires; APTES; 3-Aminoproplytriethoxysilane; AZO; aluminium zinc oxide; BLG; bilayer graphene; BIPV; building integrated ph
مقالات ISI (ترجمه نشده)
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Keywords: Monolayer graphene; Acetylene; Rapid growth; LPCVD;
Keywords: LPCVD; ZnO film; Surface morphology; Light scattering; Micromorph; Thin-film silicon solar cells
Keywords: Inherently safer design; LPCVD; Thin film deposition; 22 nm IC process; Reduction of power consumption; FMEA
Keywords: Micro ECM; Silicon-based tool electrode; Insulating film; Wet etching; LPCVD;
Phosphorus diffused LPCVD polysilicon passivated contacts with in-situ low pressure oxidation
Keywords: Passivated contacts; Polysilicon; Tunnel oxide; LPCVD; Solar cells; Contact resistivity;
Control of the electrical resistivity of Ni-Cr wires using low pressure chemical vapor deposition of tin
Keywords: LPCVD; Electrical resistivity; Ni-Cr wires; Fusible resistors; Tin;
Material properties of LPCVD processed n-type polysilicon passivating contacts and its application in PERPoly industrial bifacial solar cells
Keywords: Polysilicon; Passivating contact; Carrier selective contact; LPCVD; industrial n-type solar cell; Bifacial;
Boron carbonitride coatings synthesized by LPCVD, structure and properties
Keywords: LPCVD; Boron carbonitride; Structure; Oxidation resistance; Mechanical behavior;
n-Type polysilicon passivating contact for industrial bifacial n-type solar cells
Keywords: Polysilicon; Passivating contact; Carrier selective contact; LPCVD; n-type solar cell; Bifacial;
The oxidation effect of a Mo back contact on Cu(In,Ga)(Se,S)2 thin-film solar modules
Keywords: BZO; boron-doped zinc oxide; CBD; chemical bath deposition; CIGSS; copper-indium-gallium-sulfur selenide, Cu(In,Ga)(Se,S)2; FF; fill factor; IR imaging; infrared imaging; LPCVD; low-pressure chemical vapor deposition; SEM; scanning electron microsco
Low-defect metamorphic Si (Ge) epilayers on Si (001) with a buried template of nanocavities for multiple-junction solar cells
Keywords: Implantation; He+; Nano-bubbles; Ge(Si); LPCVD; Strain relaxation;
Ni3Si2 nanowires grown in situ on Ni foam for high-performance supercapacitors
Keywords: Ni3Si2 nanowire; Ni3Si2 nanoawl; Ni foam; LPCVD; Supercapacitors
Cost effective MEMS fabrication of a nanowire characterization platform with solder coated electrodes
Keywords: PVD; physical vapor deposition; TMAH; tetramethylammonium hydroxide; KOH; potassium hydroxide; HCL; hydrogen chloride; TNCP; thermoelectric nanowire characterization platform; TEM; transmission electron microscopy; FIB; Focused ion beam; SEM; scanning ele
Development of wound SiCBNx/SiNx/SiC with near stoichiometric SiC matrix via LSI process
Keywords: Ceramic matrix composites; SiC/SiC; LPCVD; Phenolic resin; β-Naphthol;
Stability of Cu(In,Ga)Se2 solar cells: A literature review
Keywords: a-Si:H; hydrogenated amorphous silicon; AFM; atomic force microscope; ALD; atomic layer deposition; ALT; accelerated lifetime testing; CBD; chemical bath deposition; CIGS; Cu(In,Ga)Se2; CIGSSe; Cu(In,Ga)(Se,S)2; CIS; CuInSe2; CISSe; CuIn(Se,S)2; CTE; coef
Effect of deposition temperature on deposition kinetics and mechanism of silicon boron nitride coating deposited from SiCl4–BCl3–NH3–H2–Ar mixture using low pressure chemical vapor deposition
Keywords: SiBN coating; LPCVD; Deposition temperature; Deposition kinetics; Deposition mechanism
POSFET tactile sensing arrays using CMOS technology
Keywords: POSFET; Piezoelectric oxide semiconductor field effect transistor; OFET; organic field effect transistor; P(VDF-TrFE); poly(vinylidene fluoride-trifluoroethylene); MOS; metal oxide semiconductor; MEMS; microelectromechanical systems; CMOS; complementa
Outlook on the bottleneck of carbon nanotube in desalination and membrane-based water treatment-A review
Keywords: AFM; atomic force microscope; AC; activated carbon; CNT; carbon nanotube; CNF; carbon nanofibers; CDI; capacitive deionisation; FO; forward osmosis; LPCVD; low-pressure chemical vapour deposition; MC; mesoporous carbon; MD; membrane distillation; NF; nano
Effect of gas composition on the microstructure and growth behavior of HfC coatings prepared by LPCVD
Keywords: HfC coating; LPCVD; Input C/Hf ratio; Microstructure; Growth behavior; Mechanical properties
Effects of interface between SnO2 thin film and Si substrate on growth time
Keywords: Interface; SnO2; Thin films; LPCVD; SiO2
Growth of void-free 3C-SiC films by modified two-step carbonization methods
Keywords: 3C-SiC films; LPCVD; Two-step carbonization; Microstructure
Twofold SRO films: Investigation of the photoelectric properties of MOS-like structures
Keywords: SRO; LPCVD; Photoconduction; Photoluminescence; MOS; Photoelectric;
Study of thermal stability of ZnO:B films grown by LPCVD technique
Keywords: ZnO:B; LPCVD; Light trapping; Near infrared;
A buried vertical filter for micro and nanoparticle filtration
Keywords: DFR; dry film photo-resist; DI; de-ionized (demineralized); DRIE; deep reactive ion etching; LPCVD; low pressure chemical vapor deposition; PECVD; plasma enhanced chemical vapor deposition; SEM; scanning electron microscope; Silicon micromachining; Partic
Control of LPCVD ZnO growth modes for improved light trapping in thin film silicon solar cells
Keywords: Transparent conductive oxide; ZnO; LPCVD; MOCVD; Thin film solar cell; Light trapping
Visible electroluminescence on FTO/thin SRO/n-Si structures
Keywords: Silicon rich oxide; LPCVD; FTO; Electroluminescence
Analysis of SiGe/Si quantum dot superlattices grown by low-pressure chemical vapor deposition for thin solar cells
Keywords: SiGe; Quantum dots; Superlattices; Solar cells; Dislocations; LPCVD
Silicon epitaxy on textured double layer porous silicon by LPCVD
Keywords: Porous silicon; Surface texture; Silicon epitaxy; LPCVD
Influence of substituents in vinyl groups on reactivity of parylene during polymerization process
Keywords: Parylene; LPCVD; MCSCF; DFT;
Formation of Ge nanocrystals and evolution of the oxide matrix in as-deposited and annealed LPCVD SiGeO films
Keywords: Semiconductor nanocrystals; Dielectric matrix; LPCVD; Transmission electron microscopy; Fourier-transform infrared spectroscopy;
Effect of deposition temperature on boron-doped carbon coatings deposited from a BCl3-C3H6-H2 mixture using low pressure chemical vapor deposition
Keywords: Deposition temperature; Boron-doped carbon; LPCVD; Morphologies; Bonding states;
Heteroepitaxial growth and characterization of 3C-SiC films on on-axis Si (1 1 0) substrates by LPCVD
Keywords: Si (1 1 0); 3C-SiC film; Surface morphology; LPCVD
Boron out-diffusion mechanism in oxide and nitride CMOS sidewall spacer: Impact of the materials properties
Keywords: Diffusion; PMOS; Nitride oxide; PECVD; LPCVD; Boron
Effect of H2 dilution gas on the growth of ZrC during low pressure chemical vapor deposition in the ZrCl4–CH4–Ar system
Keywords: ZrC; LPCVD; Thermodynamic calculation; Dilution gas
Combined grazing incidence RBS and TEM analysis of luminescent nano-SiGe/SiO2 multilayers
Keywords: 81.07.âb; 66.30.Pa; 81.15.Gh; 82.80.Yc; 68.37.Lp; Nanostructure multilayers; SiGe nanoparticles; LPCVD; Grazing incidence RBS; TEM;
Influence of the crystallization process on the luminescence of multilayers of SiGe nanocrystals embedded in SiO2
Keywords: SiGe nanocrystals; LPCVD; Crystallization; Transmission electron microscopy; Raman spectroscopy; Cathodoluminescence;
Temperature dependency of the LPCVD growth of ZrC with the ZrCl4–CH4–H2 system
Keywords: ZrC; LPCVD; Thermodynamic calculation; Surface reaction; Mass transport reaction; Preferred orientation
Silicon nanocrystals by thermal annealing of Si-rich silicon oxide prepared by the LPCVD method
Keywords: Si-rich silicon oxide; LPCVD; Raman scattering; Low frequency particle modes
Towards multiscale modeling of Si nanocrystals LPCVD deposition on SiO2: From ab initio calculations to reactor scale simulations
Keywords: LPCVD; Nanodots; Silicon; Modelling; DFT; CFD
Electrical and memory properties of silicon nitride structures with embedded Si nanocrystals
Keywords: 61.46.Hk; 73.63.âb; 81.07.âb; Nonvolatile memory; MNS; Silicon nitride; Si nanocrystals; LPCVD;
A study of electrical properties and microstructure of nitrogen-doped poly-SiC films deposited by LPCVD
Keywords: β-SiC; LPCVD; Nitrogen-doped; Poly-SiC; TCR
Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices
Keywords: LPCVD; ALD; Nanocrystal; Non-volatile memory; Silicon; Trisilane; Thin film
Microstructure and electrical characterization based on AFM of very high-doped polysilicon grains
Keywords: ISD polysilicon; LPCVD; AFM; TEM; SCM; Surface potential; C-AFM;
Thermal effects on LPCVD amorphous silicon
Keywords: Amorphous Si; Crystallization; LPCVD
Characterization of electronic charged states of P-doped Si quantum dots using AFM/Kelvin probe
Keywords: Si quantum dot; Phosphorous doping; LPCVD; AFM/Kelvin probe;
Decay characteristics of electronic charged states of Si quantum dots as evaluated by an AFM/Kelvin probe technique
Keywords: Si quantum dot; LPCVD; AFM/Kelvin probe; Decay characteristic
Impact of seed layer on material quality of epitaxial germanium on silicon deposited by low pressure chemical vapor deposition
Keywords: Germanium; Silicon; LPCVD; Epitaxy
Hetero-epitaxial growth of SiCGe on SiC
Keywords: SiCGe; SiC; Heterojunction; Optoelectronics; LPCVD
Control of the nucleation density of Si quantum dots by remote hydrogen plasma treatment
Keywords: 61. 46.+w; Si quantum dots; Plasma treatment; LPCVD;