کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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5365698 | 1388336 | 2010 | 10 صفحه PDF | دانلود رایگان |
The surface modification of titanium thin foil/sheet samples (0.5Â mm) implanted by nitrogen ions of 30 keV energy and a fluence of 1Â ÃÂ 1018Â N+Â cmâ2 at different temperatures is studied using XRD, AFM, SEM, and SIMS. XRD patterns showed the development of titanium nitride with different compositions in the implanted samples, while the presence of different titanium compositions such as titanium oxides was also observed. AFM images at 654Â K showed the formation of grains, that after initial sputtering of the grain boundary at 728Â K temperature, the morphology of the surface changed from small grains to a bimodal distribution of grains at 793Â K which consisted of larger grains with bright hillocks within them. This was considered to be due to phase transformation/compositional changes, explained by correlating XRD and SIMS results. The SIMS results showed a maximum at about 730Â K and a minimum at about 790Â K for both N+ density and depth of N+ penetration in the Ti sample. The variation of these results with temperature was explained on the basis of the residual gas, substrate temperature, dissociation of water in the chamber and the gettering property of titanium.
Journal: Applied Surface Science - Volume 256, Issue 14, 1 May 2010, Pages 4502-4511