Deposition and characterization of La2Ti2O7 thin films via spray pyrolysis process

Thin films of La2Ti2O7 have been deposited on fused silica and Si substrates by a spray pyrolysis method using ethylene glycol solution of La(III)-Ti(IV)-citrate complexes as starting material and O2 as a carrier gas. The composition, crystal structure and morphology of the films are studied.