Synthesis of free standing carbon nanosheet using electron cyclotron resonance plasma enhanced chemical vapor deposition

Carbon nanosheets (CNSs) have been synthesized by electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposition (PECVD) using a mixture of acetylene and argon gases on copper foil as the substrate. Micrometer-wide carbon sheets consisting of several atomic layers thick graphene sheets have been synthesized by controlled decomposition of carbon radicals in ECR-PECVD. Raman spectroscopy of these films revealed characteristics of a disordered graphitic sheet. Thick folded carbon-sheets and a semi transparent freestanding CNSs have been observed by scanning electron microscopy. This is a promising technique to synthesize free standing CNSs and can be used in the fabrication of nanoelecronic devices in future.

In this study we have shown the growth of carbon nanosheets of several micrometer wide on Cu substrates using electron cyclotron resonance (ECR) plasma. Thick folded carbon-sheets and a semi transparent freestanding CNSs have been observed by scanning electron microscopy (A-C show different zones on the sheets).Highlights► The carbon films were synthesized from the acetylene using microwave assisted electron cyclotron resonance plasma enhanced CVD. ► Carbon nanosheets (CNSs) were grown over the Cu substrate having several micrometer wide in area. ► The growth rate of CNSs was very high.