کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5370118 | 1388475 | 2006 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Formation and Shape Transition of Nanostructures on Si(100) surfaces after MeV Sb Implantation
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We have studied the formation of nanostructures on Si(100) surfaces after 1.5âMeV Sb implantation. Scanning Probe Microscopy has been utilized to investigate the ion implanted surfaces. We observe the formation of nanostructures after a fluence of 1Ã1013âions/cm2. These surface structures are elliptical in shape with an eccentricity of 0.86 and their major and minor axes having dimensions of about 11.6ânm and 23.0ânm, respectively. The area of the nanostructure is 210ânm2at this fluence. Although the nanostructures remain of elliptical shape, their area increase with increasing fluence. However, after a fluence of 5Ã1014âions/cm2 a transition in shape of nanostructures is observed. Nanostructures become approximately circular with an eccentricity of 0.19 and a diameter of about 30.1ânm. At this fluence we also observe a large increase in the area of the nanostructures to 726ânm2. Surface morphology and surface roughness of the ion implanted surfaces has also been discussed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 253, Issue 3, 30 November 2006, Pages 1116-1121
Journal: Applied Surface Science - Volume 253, Issue 3, 30 November 2006, Pages 1116-1121
نویسندگان
Soma Dey, Dipak Paramanik, V. Ganesan, Shikha Varma,