Evidence for the interfacial reaction between Ni adatoms and H-Si(001) surface

► Hydrogen termination does not suppress the interfacial reaction between Ni and Si. ► Below 33% Ni, a silicide-like layer forms and prevents Ni from oxidation in air. ► Ni grows in a pseudo-layer-by-layer mode on the H-Si surface. ► A metallic Ni/Ni-rich-silicide-like/NiSi-like structure grows eventually on H-Si.